Nanosystem Fabrication Facility (NFF)
The Nanosystem Fabrication Facility (NFF) is the first microfabrication laboratory established at a tertiary institution in Hong Kong. The mission of the NFF is to provide facilities for the faculty and students of the University to conduct teaching, research and industrial services. Currently, there are over 200 projects covering the many interdisplinary research areas including: Micro-Electro-Mechanical systems (MEMS), flat panel displays, biochips, advanced Ultra-large Scale Integrated (ULSI) devices and technologies, RF and power semiconductor devices and technology, advanced electronic packaging, nanoscience and technology, sensors and actuators, etc.
Since April 1997, the technical capabilities of the NFF has been further upgraded with completion of its Phase II laboratory. The Phase II laboratory occupies an area of 750 square meters with the lithography area providing Class 100 environment. A complete 4" silicon wafer processing line has been installed, which provides photolithography, thermal diffusion, thin-film deposition, dry/wet etching, metallization, implantation and mask making services. The facility also includes an E-beam Direct Write System which provides patterning capability down to 150 nano-meters. With the additional capabilities and capacity, NFF has extended its service to other tertiary institutions in Hong Kong, China and private companies through various technical collaborations.